Edwards Advanced Diagnostic Services
Introduction
FabWorks-iMS advanced diagnostic services (EADS) offer multi-parameter algorithms to anticipate the onset of process related issues in vacuum pump and abatement equipment. These services can significantly reduce costs and improve productivity by:
- minimising the number of scrapped wafer batches and unplanned tool downtime;
- maximising wafer throughput / yield;
- providing reduced total cost of ownership (TCO) by servicing equipment when necessary.
EADS Models
A range of FabWorks-iMS EADS models are available. These include:
- Dry pump deposition
- Booster deposition
- Abatement combustor blockages
- Exhaust/trap blockages
- Turbo system contamination (in development)
- Turbo system leak detection (in development)
For each model, there are generally three alerts at two levels.
WARNING:Predictive Monitoring Started |
Status of equipment changed from nominal operation. |
WARNING:Recommend PM |
Equipment under stress & should be removed at the earliest opportunity. |
ALARM:Do Not Start a New Process |
High risk of an in-process failure |
EADS Customer Case Studies
Two customer case studies are presented - for dry pump deposition and abatement combustor blockages.
Dry Pump Deposition (LPCVD Nitride)
Dry pump deposition issues generally occur after prolonged periods of processing. Failure based trends vary in accordance with the semiconductor process and vacuum equipment type.
During a yearly EADS installation at one customer, 5 swap-out decisions were generated (over an install base of 60 pumps/chambers) with only one in process failure undetectable by our EADS models. As a comparison in the year prior to installation of EADS the customer had experienced a total of 5 in process based failures. As a result, significant value has been derived for this batch process application – 1 crash can typically amount to around $150K or more in lost wafers.
Abatement Combustor Blockages (PECVD)
Abatement combustor blockages occur in exhaust gas management equipment on powdery applications. A blockage usually results in unplanned Tool downtime of over 5 hours.
Following the introduction of EADS techniques over a yearly period at one customer, there was a consistant reduction in unplanned downtime of between 15 and 20 hours per week. This reduction in downtime led to increased tool efficiency, optimised utilization and also enabled the fab to surpass their environmental targets for the year due to increased abatement uptime.
Conclusions
FabWorks-iMS EADS can provide a range of models that deliver a range of business benefits. These benefits include increased productivity, reduced total cost of ownership (TCO) and improved environmental cost savings; underpinning the demands of our customers in today’s semiconductor and solar industries. For more information on FabWorks-iMS EADS, contact FabWorks-iMS EADS team etc details as below.
Further Information
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