FabWorks-iMS: Complete Vacuum and Abatement Monitoring
As part of our value-added services, Edwards offers the FabWorks Intelligent Monitoring System, a complete condition monitoring and analysis system for vacuum and exhaust management equipment.
FabWorks-iMS improves fab efficiency and delivers cost savings by constantly monitoring networked equipment and providing the user with important status information. In addition, our Advanced Diagnostic Services (ADS) can add further value by helping to predict process induced equipment issues, thus reducing down-time and cutting costs.
FabWorks-iMS is offered as a licensed package that is often integrated with a service contract. A FabWorks-iMS installation is comprised of four main elements:
• Network Hardware and Commissioning
• Server and License Package
• FabWorks-iMS Maintenance
• Additional Options
Network Hardware and Commissioning
FabWorks-iMS can simultaneously support networks of both Lonworks and Ethernet devices.
Scope: Pump Network Interface Modules (NIMs), Abatement System Interface Modules (SIMs), cables, router housings, network connectivity checks. Ethernet connectivity is available on turbomolecular pumps and other newer equipment.
Items are sold individually.
FabWorks-iMS Server and License Package
A server comes pre-installed with FabWorks-iMS software allowing up to 3,000 items of Edwards equipment to be monitored via any PC connected to the Local Area Network. The License Package includes the first year’s FabWorks-iMS Maintenance and support ensuring optimum network performance and peace of mind.
Included in the License Package:
• Server and Operating System
• MS SQL Server
• Installation and Setup
• FabWorks-iMS Equipment Manager
• Fab Explorer
• DART
• SAM
• Autopager
• Service Facility
• User Manager
• First year’s FabWorks-iMS Maintenance and Support
FabWorks-IMS Maintenance
Following the first year of FabWorks-iMS installation, FabWorks-iMS Maintenance is offered as part of an annual package. FabWorks-iMS Maintenance ensures maximum availability of the FabWorks-iMS network and enables users to exploit FabWorks-iMS’ full range of functionality.
FabWorks-iMS Maintenance includes support, FabWorks-iMS software upgrades, data and server management. FabWorks-iMS remote e-diagnostics services (via an E-Link) allows rapid support and training from Edwards system experts. Data and server management is included where an on-site team or E-Link is in place.
FabWorks-iMS Software - Applications
Equipment Manager allows any item on the network to be grouped into logical structures that relate to processes, tools and chambers, making it easy for section leaders to view the status of Edwards equipment.
Fab Explorer is used to view the status and alerts of all items on the network to provide an ‘at a glance’ view and to highlight important events.
Data Logger allows a user to manage the rate at which sensor data is sampled. This optimizes information capture and maintains reliable network operation.
Data Analysis and Reporting Tool (DART) organizes the information captured by Data Logger into useful reports, tables and graphs. Equipment status history and parameters can be tracked and abatement up-time/down-time reports can be created allowing users to assess equipment performance.
Smart Alerts Manager (SAM) provides alert tracking functionality that enables service users to prioritize maintenance actions. SAM also allows a user to configure individual parameter alert thresholds so that parameter deviations are highlighted only when the thresholds are exceeded.
Auto Pager provides remote alert notifications to designated engineers by pager, email, SMS text or RSS feed. AutoPager enables a rapid response to alerts from any location.
Service Facility provides automated reports on the history of equipment connected to the network. This assists with equipment maintenance tracking and helps improve fab management efficiency.
User Manager controls access to FabWorks-iMS and allows the user to customize access restrictions to any FabWorks-iMS application. This provides security and allows for the creation of personalized views within FabWorks-iMS.
Additional Options
FabWorks-iMS functionality can be extended to significantly reduce fab operating costs and provide higher value services.
Advanced Diagnostics Services
FabWorks-iMS Advanced Diagnostics Services (EADS) offers analytical tools, algorithms and reports that automate graphical analysis to identify tell tale fingerprints of process related issues. These services can significantly reduce costs and improve productivity by:
• Minimizing the number of scrapped wafer batches/unplanned downtime
• Providing optimized maintenance costs by servicing equipment when necessary
Using an E-link, FabWorks-iMS experts can expedite the set up, commissioning and ongoing maintenance of Advanced Diagnostic Services, thus enabling observable benefits to be realized earlier.